4/6/2010	11:30:25 AM	Program exited cleanly
4/6/2010	11:43:30 AM	Program started normally
4/6/2010	11:43:30 AM	Helium valve closed
4/6/2010	11:43:30 AM	H2 valve closed
4/6/2010	11:43:30 AM	BCl3 valve closed
4/6/2010	11:43:30 AM	PH3 valve closed
4/6/2010	11:43:30 AM	SiCl4 pre valve closed
4/6/2010	11:43:30 AM	SiCl4 post valve closed
4/6/2010	11:43:30 AM	Main Vac valve closed
4/6/2010	11:43:30 AM	Bypass valve closed
4/6/2010	11:43:30 AM	Bubbler valve closed
4/6/2010	11:43:30 AM	Helium MFC set to  0.000000
4/6/2010	11:43:30 AM	H2 MFC set to  0.000000
4/6/2010	11:43:30 AM	BCl3 MFC set to  0.000000
4/6/2010	11:43:30 AM	SiCl4 MFC set to  0.000000
4/6/2010	11:43:30 AM	Bypass solenoid MFC set to  760.000000
4/6/2010	11:43:30 AM	Tube furnace set to 0
4/6/2010	11:43:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/6/2010	11:43:33 AM	Recipe started at 11:43 AM
4/6/2010	11:43:33 AM	H2 valve closed
4/6/2010	11:43:33 AM	BCl3 valve closed
4/6/2010	11:43:33 AM	PH3 valve closed
4/6/2010	11:43:33 AM	SiCl4 pre valve closed
4/6/2010	11:43:33 AM	SiCl4 post valve closed
4/6/2010	11:43:33 AM	Main Vac valve closed
4/6/2010	11:43:33 AM	Bypass valve closed
4/6/2010	11:43:33 AM	Bubbler valve closed
4/6/2010	11:43:33 AM	Helium valve opened
4/6/2010	11:43:33 AM	Helium MFC set to  500.000000
4/6/2010	11:43:33 AM	H2 MFC set to  0.000000
4/6/2010	11:43:33 AM	BCl3 MFC set to  0.000000
4/6/2010	11:43:33 AM	SiCl4 MFC set to  0.000000
4/6/2010	11:43:33 AM	Bypass solenoid MFC set to  0.000000
4/6/2010	11:43:33 AM	Tube furnace set to 0
4/6/2010	11:43:36 AM	Run aborted at 11:43 AM
4/6/2010	11:43:36 AM	Helium valve closed
4/6/2010	11:43:36 AM	H2 valve closed
4/6/2010	11:43:36 AM	BCl3 valve closed
4/6/2010	11:43:36 AM	PH3 valve closed
4/6/2010	11:43:36 AM	SiCl4 pre valve closed
4/6/2010	11:43:36 AM	SiCl4 post valve closed
4/6/2010	11:43:36 AM	Bypass valve closed
4/6/2010	11:43:36 AM	Main Vac valve closed
4/6/2010	11:43:36 AM	Bubbler valve closed
4/6/2010	11:43:36 AM	Helium MFC set to  0.000000
4/6/2010	11:43:36 AM	H2 MFC set to  0.000000
4/6/2010	11:43:36 AM	BCl3 MFC set to  0.000000
4/6/2010	11:43:36 AM	SiCl4 MFC set to  0.000000
4/6/2010	11:43:36 AM	Tube furnace set to 0
4/6/2010	11:43:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/6/2010	11:43:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/6/2010	11:43:39 AM	Recipe started at 11:43 AM
4/6/2010	11:43:39 AM	Helium valve closed
4/6/2010	11:43:39 AM	H2 valve closed
4/6/2010	11:43:39 AM	BCl3 valve closed
4/6/2010	11:43:39 AM	PH3 valve closed
4/6/2010	11:43:39 AM	SiCl4 pre valve closed
4/6/2010	11:43:39 AM	SiCl4 post valve closed
4/6/2010	11:43:39 AM	Main Vac valve closed
4/6/2010	11:43:39 AM	Bubbler valve closed
4/6/2010	11:43:39 AM	Bypass valve opened
4/6/2010	11:43:39 AM	Helium MFC set to  0.000000
4/6/2010	11:43:39 AM	H2 MFC set to  0.000000
4/6/2010	11:43:39 AM	BCl3 MFC set to  0.000000
4/6/2010	11:43:39 AM	SiCl4 MFC set to  0.000000
4/6/2010	11:43:39 AM	Bypass solenoid MFC set to  0.000000
4/6/2010	11:43:39 AM	Tube furnace set to 0
4/6/2010	11:43:40 AM	Helium valve closed
4/6/2010	11:43:40 AM	H2 valve closed
4/6/2010	11:43:40 AM	BCl3 valve closed
4/6/2010	11:43:40 AM	PH3 valve closed
4/6/2010	11:43:40 AM	SiCl4 pre valve closed
4/6/2010	11:43:40 AM	SiCl4 post valve closed
4/6/2010	11:43:40 AM	Bubbler valve closed
4/6/2010	11:43:40 AM	Main Vac valve opened
4/6/2010	11:43:40 AM	Bypass valve opened
4/6/2010	11:43:40 AM	Helium MFC set to  0.000000
4/6/2010	11:43:40 AM	H2 MFC set to  0.000000
4/6/2010	11:43:40 AM	BCl3 MFC set to  0.000000
4/6/2010	11:43:40 AM	SiCl4 MFC set to  0.000000
4/6/2010	11:43:40 AM	Bypass solenoid MFC set to  0.000000
4/6/2010	11:43:40 AM	Tube furnace set to 0
4/6/2010	11:43:40 AM	Run finished at 11:43 AM
4/6/2010	11:43:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/6/2010	11:47:47 AM	SiCl4 pre valve opened
4/6/2010	11:47:53 AM	SiCl4 MFC set to  250.000000
4/6/2010	11:48:27 AM	Program exited cleanly
4/6/2010	11:49:23 AM	Program started normally
4/6/2010	11:49:23 AM	Helium valve closed
4/6/2010	11:49:23 AM	H2 valve closed
4/6/2010	11:49:23 AM	BCl3 valve closed
4/6/2010	11:49:23 AM	PH3 valve closed
4/6/2010	11:49:23 AM	SiCl4 pre valve closed
4/6/2010	11:49:23 AM	SiCl4 post valve closed
4/6/2010	11:49:23 AM	Main Vac valve closed
4/6/2010	11:49:23 AM	Bypass valve closed
4/6/2010	11:49:23 AM	Bubbler valve closed
4/6/2010	11:49:23 AM	Helium MFC set to  0.000000
4/6/2010	11:49:23 AM	H2 MFC set to  0.000000
4/6/2010	11:49:23 AM	BCl3 MFC set to  0.000000
4/6/2010	11:49:23 AM	SiCl4 MFC set to  0.000000
4/6/2010	11:49:23 AM	Bypass solenoid MFC set to  760.000000
4/6/2010	11:49:23 AM	Tube furnace set to 0
4/6/2010	11:49:27 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/6/2010	11:49:28 AM	Recipe started at 11:49 AM
4/6/2010	11:49:28 AM	Helium valve closed
4/6/2010	11:49:28 AM	H2 valve closed
4/6/2010	11:49:28 AM	BCl3 valve closed
4/6/2010	11:49:28 AM	PH3 valve closed
4/6/2010	11:49:28 AM	SiCl4 pre valve closed
4/6/2010	11:49:28 AM	SiCl4 post valve closed
4/6/2010	11:49:28 AM	Main Vac valve closed
4/6/2010	11:49:28 AM	Bubbler valve closed
4/6/2010	11:49:28 AM	Bypass valve opened
4/6/2010	11:49:28 AM	Helium MFC set to  0.000000
4/6/2010	11:49:28 AM	H2 MFC set to  0.000000
4/6/2010	11:49:28 AM	BCl3 MFC set to  0.000000
4/6/2010	11:49:28 AM	SiCl4 MFC set to  0.000000
4/6/2010	11:49:28 AM	Bypass solenoid MFC set to  0.000000
4/6/2010	11:49:28 AM	Tube furnace set to 0
4/6/2010	11:49:28 AM	Helium valve closed
4/6/2010	11:49:28 AM	H2 valve closed
4/6/2010	11:49:28 AM	BCl3 valve closed
4/6/2010	11:49:28 AM	PH3 valve closed
4/6/2010	11:49:28 AM	SiCl4 pre valve closed
4/6/2010	11:49:28 AM	SiCl4 post valve closed
4/6/2010	11:49:28 AM	Bubbler valve closed
4/6/2010	11:49:28 AM	Main Vac valve opened
4/6/2010	11:49:28 AM	Bypass valve opened
4/6/2010	11:49:28 AM	Helium MFC set to  0.000000
4/6/2010	11:49:28 AM	H2 MFC set to  0.000000
4/6/2010	11:49:28 AM	BCl3 MFC set to  0.000000
4/6/2010	11:49:28 AM	SiCl4 MFC set to  0.000000
4/6/2010	11:49:28 AM	Bypass solenoid MFC set to  0.000000
4/6/2010	11:49:28 AM	Tube furnace set to 0
4/6/2010	11:49:29 AM	Run finished at 11:49 AM
4/6/2010	11:49:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/6/2010	11:49:31 AM	SiCl4 pre valve opened
4/6/2010	11:49:35 AM	SiCl4 MFC set to  100.000000
4/6/2010	11:50:02 AM	SiCl4 MFC set to  250.000000
4/6/2010	11:51:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/6/2010	11:51:50 AM	Recipe started at 11:51 AM
4/6/2010	11:51:50 AM	Helium valve closed
4/6/2010	11:51:50 AM	H2 valve closed
4/6/2010	11:51:50 AM	BCl3 valve closed
4/6/2010	11:51:50 AM	PH3 valve closed
4/6/2010	11:51:50 AM	SiCl4 pre valve closed
4/6/2010	11:51:50 AM	SiCl4 post valve closed
4/6/2010	11:51:50 AM	Main Vac valve closed
4/6/2010	11:51:50 AM	Bypass valve closed
4/6/2010	11:51:50 AM	Bubbler valve closed
4/6/2010	11:51:50 AM	Helium MFC set to  0.000000
4/6/2010	11:51:50 AM	H2 MFC set to  0.000000
4/6/2010	11:51:50 AM	BCl3 MFC set to  0.000000
4/6/2010	11:51:50 AM	SiCl4 MFC set to  0.000000
4/6/2010	11:51:50 AM	Bypass solenoid MFC set to  0.000000
4/6/2010	11:51:50 AM	Tube furnace set to 0
4/6/2010	11:51:50 AM	Run finished at 11:51 AM
4/6/2010	11:51:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/6/2010	11:51:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/6/2010	11:51:53 AM	Recipe started at 11:51 AM
4/6/2010	11:51:53 AM	Helium valve closed
4/6/2010	11:51:53 AM	H2 valve closed
4/6/2010	11:51:53 AM	BCl3 valve closed
4/6/2010	11:51:53 AM	PH3 valve closed
4/6/2010	11:51:53 AM	SiCl4 pre valve closed
4/6/2010	11:51:53 AM	SiCl4 post valve closed
4/6/2010	11:51:53 AM	Main Vac valve closed
4/6/2010	11:51:53 AM	Bubbler valve closed
4/6/2010	11:51:53 AM	Bypass valve opened
4/6/2010	11:51:53 AM	Helium MFC set to  0.000000
4/6/2010	11:51:53 AM	H2 MFC set to  0.000000
4/6/2010	11:51:53 AM	BCl3 MFC set to  0.000000
4/6/2010	11:51:53 AM	SiCl4 MFC set to  0.000000
4/6/2010	11:51:53 AM	Bypass solenoid MFC set to  0.000000
4/6/2010	11:51:53 AM	Tube furnace set to 0
4/6/2010	11:51:54 AM	Helium valve closed
4/6/2010	11:51:54 AM	H2 valve closed
4/6/2010	11:51:54 AM	BCl3 valve closed
4/6/2010	11:51:54 AM	PH3 valve closed
4/6/2010	11:51:54 AM	SiCl4 pre valve closed
4/6/2010	11:51:54 AM	SiCl4 post valve closed
4/6/2010	11:51:54 AM	Bubbler valve closed
4/6/2010	11:51:54 AM	Main Vac valve opened
4/6/2010	11:51:54 AM	Bypass valve opened
4/6/2010	11:51:54 AM	Helium MFC set to  0.000000
4/6/2010	11:51:54 AM	H2 MFC set to  0.000000
4/6/2010	11:51:54 AM	BCl3 MFC set to  0.000000
4/6/2010	11:51:54 AM	SiCl4 MFC set to  0.000000
4/6/2010	11:51:54 AM	Bypass solenoid MFC set to  0.000000
4/6/2010	11:51:54 AM	Tube furnace set to 0
4/6/2010	11:51:54 AM	Run finished at 11:51 AM
4/6/2010	11:51:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/6/2010	2:38:15 PM	SiCl4 pre valve opened
4/6/2010	2:38:23 PM	Helium valve opened
4/6/2010	2:38:27 PM	Helium MFC set to  500.000000
4/6/2010	2:38:45 PM	SiCl4 MFC set to  500.000000
4/6/2010	3:35:20 PM	Helium valve closed
4/6/2010	3:35:22 PM	Helium MFC set to  0.000000
4/6/2010	3:35:28 PM	SiCl4 MFC set to  0.000000
4/6/2010	3:35:30 PM	SiCl4 pre valve closed
4/6/2010	3:36:04 PM	SiCl4 MFC set to  10.000000
4/6/2010	3:36:07 PM	SiCl4 pre valve opened
4/6/2010	3:36:44 PM	SiCl4 pre valve closed
4/6/2010	3:36:46 PM	SiCl4 pre valve opened
4/6/2010	3:37:51 PM	SiCl4 MFC set to  0.000000
4/6/2010	3:38:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/6/2010	3:38:24 PM	Recipe started at 3:38 PM
4/6/2010	3:38:24 PM	H2 valve closed
4/6/2010	3:38:24 PM	BCl3 valve closed
4/6/2010	3:38:24 PM	PH3 valve closed
4/6/2010	3:38:24 PM	SiCl4 pre valve closed
4/6/2010	3:38:24 PM	SiCl4 post valve closed
4/6/2010	3:38:24 PM	Main Vac valve closed
4/6/2010	3:38:24 PM	Bypass valve closed
4/6/2010	3:38:24 PM	Bubbler valve closed
4/6/2010	3:38:24 PM	Helium valve opened
4/6/2010	3:38:24 PM	Helium MFC set to  500.000000
4/6/2010	3:38:24 PM	H2 MFC set to  0.000000
4/6/2010	3:38:24 PM	BCl3 MFC set to  0.000000
4/6/2010	3:38:24 PM	SiCl4 MFC set to  0.000000
4/6/2010	3:38:24 PM	Bypass solenoid MFC set to  0.000000
4/6/2010	3:38:24 PM	Tube furnace set to 0
4/6/2010	3:39:44 PM	Helium valve closed
4/6/2010	3:39:44 PM	H2 valve closed
4/6/2010	3:39:44 PM	BCl3 valve closed
4/6/2010	3:39:44 PM	PH3 valve closed
4/6/2010	3:39:44 PM	SiCl4 pre valve closed
4/6/2010	3:39:44 PM	SiCl4 post valve closed
4/6/2010	3:39:44 PM	Main Vac valve closed
4/6/2010	3:39:44 PM	Bypass valve closed
4/6/2010	3:39:44 PM	Bubbler valve closed
4/6/2010	3:39:44 PM	Helium MFC set to  0.000000
4/6/2010	3:39:44 PM	H2 MFC set to  0.000000
4/6/2010	3:39:44 PM	BCl3 MFC set to  0.000000
4/6/2010	3:39:44 PM	SiCl4 MFC set to  0.000000
4/6/2010	3:39:44 PM	Bypass solenoid MFC set to  0.000000
4/6/2010	3:39:45 PM	Tube furnace set to 0
4/6/2010	3:39:45 PM	Run finished at 3:39 PM
4/6/2010	3:39:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/6/2010	3:39:55 PM	SiCl4 MFC set to  200.000000
4/6/2010	3:39:56 PM	SiCl4 pre valve opened
4/6/2010	3:40:57 PM	SiCl4 pre valve closed
4/6/2010	3:41:15 PM	SiCl4 pre valve opened
4/6/2010	3:41:19 PM	SiCl4 pre valve closed
4/6/2010	3:42:25 PM	SiCl4 MFC set to  325.000000
4/6/2010	3:42:26 PM	SiCl4 pre valve opened
4/6/2010	3:43:33 PM	SiCl4 MFC set to  500.000000
4/6/2010	3:44:34 PM	H2 MFC set to  500.000000
4/6/2010	3:44:40 PM	H2 valve opened
4/6/2010	3:44:43 PM	Bubbler valve opened
4/6/2010	3:44:51 PM	H2 valve closed
4/6/2010	3:44:52 PM	Bubbler valve closed
4/6/2010	3:45:16 PM	Bubbler valve opened
4/6/2010	3:45:20 PM	H2 valve opened
4/6/2010	3:46:03 PM	Bubbler valve closed
4/6/2010	3:46:03 PM	H2 valve closed
4/6/2010	3:46:32 PM	H2 valve opened
4/6/2010	3:46:34 PM	Bubbler valve opened
4/6/2010	3:59:07 PM	SiCl4 MFC set to  500.000000
4/6/2010	4:02:48 PM	SiCl4 pre valve closed
4/6/2010	4:02:52 PM	SiCl4 MFC set to  0.000000
4/6/2010	4:04:18 PM	Recipe started at 4:04 PM
4/6/2010	4:04:18 PM	Helium valve closed
4/6/2010	4:04:18 PM	BCl3 valve closed
4/6/2010	4:04:18 PM	PH3 valve closed
4/6/2010	4:04:18 PM	SiCl4 pre valve closed
4/6/2010	4:04:18 PM	SiCl4 post valve closed
4/6/2010	4:04:18 PM	Main Vac valve closed
4/6/2010	4:04:18 PM	Bypass valve closed
4/6/2010	4:04:18 PM	Bubbler valve closed
4/6/2010	4:04:18 PM	H2 valve opened
4/6/2010	4:04:18 PM	Helium MFC set to  0.000000
4/6/2010	4:04:18 PM	H2 MFC set to  500.000000
4/6/2010	4:04:18 PM	BCl3 MFC set to  0.000000
4/6/2010	4:04:18 PM	SiCl4 MFC set to  0.000000
4/6/2010	4:04:18 PM	Bypass solenoid MFC set to  0.000000
4/6/2010	4:04:19 PM	Tube furnace set to 0
4/6/2010	4:04:19 PM	Helium valve closed
4/6/2010	4:04:19 PM	BCl3 valve closed
4/6/2010	4:04:19 PM	PH3 valve closed
4/6/2010	4:04:19 PM	SiCl4 pre valve closed
4/6/2010	4:04:19 PM	SiCl4 post valve closed
4/6/2010	4:04:19 PM	Main Vac valve closed
4/6/2010	4:04:19 PM	Bypass valve closed
4/6/2010	4:04:19 PM	H2 valve opened
4/6/2010	4:04:19 PM	Bubbler valve opened
4/6/2010	4:04:19 PM	Helium MFC set to  0.000000
4/6/2010	4:04:19 PM	H2 MFC set to  500.000000
4/6/2010	4:04:19 PM	BCl3 MFC set to  0.000000
4/6/2010	4:04:19 PM	SiCl4 MFC set to  0.000000
4/6/2010	4:04:19 PM	Bypass solenoid MFC set to  0.000000
4/6/2010	4:04:19 PM	Tube furnace set to 1000
4/6/2010	4:04:20 PM	Helium valve closed
4/6/2010	4:04:20 PM	BCl3 valve closed
4/6/2010	4:04:20 PM	PH3 valve closed
4/6/2010	4:04:20 PM	Main Vac valve closed
4/6/2010	4:04:20 PM	Bypass valve closed
4/6/2010	4:04:20 PM	H2 valve opened
4/6/2010	4:04:20 PM	SiCl4 pre valve opened
4/6/2010	4:04:20 PM	SiCl4 post valve opened
4/6/2010	4:04:20 PM	Bubbler valve opened
4/6/2010	4:04:20 PM	Helium MFC set to  0.000000
4/6/2010	4:04:20 PM	H2 MFC set to  500.000000
4/6/2010	4:04:20 PM	BCl3 MFC set to  0.000000
4/6/2010	4:04:20 PM	SiCl4 MFC set to  200.000000
4/6/2010	4:04:20 PM	Bypass solenoid MFC set to  0.000000
4/6/2010	4:04:20 PM	Tube furnace set to 1000
4/6/2010	4:19:20 PM	Helium valve closed
4/6/2010	4:19:20 PM	BCl3 valve closed
4/6/2010	4:19:20 PM	PH3 valve closed
4/6/2010	4:19:20 PM	SiCl4 pre valve closed
4/6/2010	4:19:20 PM	SiCl4 post valve closed
4/6/2010	4:19:20 PM	Main Vac valve closed
4/6/2010	4:19:20 PM	Bypass valve closed
4/6/2010	4:19:20 PM	H2 valve opened
4/6/2010	4:19:20 PM	Bubbler valve opened
4/6/2010	4:19:20 PM	Helium MFC set to  0.000000
4/6/2010	4:19:20 PM	H2 MFC set to  500.000000
4/6/2010	4:19:20 PM	BCl3 MFC set to  0.000000
4/6/2010	4:19:20 PM	SiCl4 MFC set to  0.000000
4/6/2010	4:19:20 PM	Bypass solenoid MFC set to  0.000000
4/6/2010	4:19:20 PM	Tube furnace set to 0
4/6/2010	4:39:20 PM	H2 valve closed
4/6/2010	4:39:20 PM	BCl3 valve closed
4/6/2010	4:39:20 PM	PH3 valve closed
4/6/2010	4:39:20 PM	SiCl4 pre valve closed
4/6/2010	4:39:20 PM	SiCl4 post valve closed
4/6/2010	4:39:20 PM	Main Vac valve closed
4/6/2010	4:39:20 PM	Bypass valve closed
4/6/2010	4:39:20 PM	Helium valve opened
4/6/2010	4:39:20 PM	Bubbler valve opened
4/6/2010	4:39:20 PM	Helium MFC set to  500.000000
4/6/2010	4:39:20 PM	H2 MFC set to  0.000000
4/6/2010	4:39:20 PM	BCl3 MFC set to  0.000000
4/6/2010	4:39:20 PM	SiCl4 MFC set to  0.000000
4/6/2010	4:39:20 PM	Bypass solenoid MFC set to  0.000000
4/6/2010	4:39:20 PM	Tube furnace set to 0
4/6/2010	4:49:16 PM	Run aborted at 4:49 PM
4/6/2010	4:49:16 PM	Helium valve closed
4/6/2010	4:49:16 PM	H2 valve closed
4/6/2010	4:49:16 PM	BCl3 valve closed
4/6/2010	4:49:16 PM	PH3 valve closed
4/6/2010	4:49:16 PM	SiCl4 pre valve closed
4/6/2010	4:49:16 PM	SiCl4 post valve closed
4/6/2010	4:49:16 PM	Bypass valve closed
4/6/2010	4:49:16 PM	Main Vac valve closed
4/6/2010	4:49:16 PM	Bubbler valve closed
4/6/2010	4:49:16 PM	Helium MFC set to  0.000000
4/6/2010	4:49:16 PM	H2 MFC set to  0.000000
4/6/2010	4:49:16 PM	BCl3 MFC set to  0.000000
4/6/2010	4:49:16 PM	SiCl4 MFC set to  0.000000
4/6/2010	4:49:17 PM	Tube furnace set to 0
4/6/2010	4:49:26 PM	H2 MFC set to  0.000000
4/6/2010	4:49:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/6/2010	4:49:29 PM	Recipe started at 4:49 PM
4/6/2010	4:49:29 PM	Helium valve closed
4/6/2010	4:49:29 PM	H2 valve closed
4/6/2010	4:49:29 PM	BCl3 valve closed
4/6/2010	4:49:29 PM	PH3 valve closed
4/6/2010	4:49:29 PM	SiCl4 pre valve closed
4/6/2010	4:49:29 PM	SiCl4 post valve closed
4/6/2010	4:49:29 PM	Main Vac valve closed
4/6/2010	4:49:29 PM	Bypass valve closed
4/6/2010	4:49:29 PM	Bubbler valve closed
4/6/2010	4:49:29 PM	Helium MFC set to  0.000000
4/6/2010	4:49:29 PM	H2 MFC set to  0.000000
4/6/2010	4:49:29 PM	BCl3 MFC set to  0.000000
4/6/2010	4:49:29 PM	SiCl4 MFC set to  0.000000
4/6/2010	4:49:29 PM	Bypass solenoid MFC set to  0.000000
4/6/2010	4:49:29 PM	Tube furnace set to 0
4/6/2010	4:49:29 PM	Run finished at 4:49 PM
4/6/2010	4:49:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
4/6/2010	4:49:33 PM	H2 valve opened
4/6/2010	4:49:34 PM	H2 valve closed
4/6/2010	4:49:39 PM	H2 MFC set to  200.000000
4/6/2010	4:49:43 PM	H2 valve opened
4/6/2010	4:49:52 PM	H2 valve closed
4/6/2010	4:51:12 PM	Bubbler valve opened
4/6/2010	4:52:08 PM	Bubbler valve closed
4/6/2010	4:52:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/6/2010	4:52:15 PM	Recipe started at 4:52 PM
4/6/2010	4:52:15 PM	Helium valve closed
4/6/2010	4:52:15 PM	H2 valve closed
4/6/2010	4:52:15 PM	BCl3 valve closed
4/6/2010	4:52:15 PM	PH3 valve closed
4/6/2010	4:52:15 PM	SiCl4 pre valve closed
4/6/2010	4:52:15 PM	SiCl4 post valve closed
4/6/2010	4:52:15 PM	Main Vac valve closed
4/6/2010	4:52:15 PM	Bubbler valve closed
4/6/2010	4:52:15 PM	Bypass valve opened
4/6/2010	4:52:15 PM	Helium MFC set to  0.000000
4/6/2010	4:52:15 PM	H2 MFC set to  0.000000
4/6/2010	4:52:15 PM	BCl3 MFC set to  0.000000
4/6/2010	4:52:15 PM	SiCl4 MFC set to  0.000000
4/6/2010	4:52:15 PM	Bypass solenoid MFC set to  0.000000
4/6/2010	4:52:16 PM	Tube furnace set to 0
4/6/2010	4:52:36 PM	Helium valve closed
4/6/2010	4:52:36 PM	H2 valve closed
4/6/2010	4:52:36 PM	BCl3 valve closed
4/6/2010	4:52:36 PM	PH3 valve closed
4/6/2010	4:52:36 PM	SiCl4 pre valve closed
4/6/2010	4:52:36 PM	SiCl4 post valve closed
4/6/2010	4:52:36 PM	Bubbler valve closed
4/6/2010	4:52:36 PM	Main Vac valve opened
4/6/2010	4:52:36 PM	Bypass valve opened
4/6/2010	4:52:36 PM	Helium MFC set to  0.000000
4/6/2010	4:52:36 PM	H2 MFC set to  0.000000
4/6/2010	4:52:36 PM	BCl3 MFC set to  0.000000
4/6/2010	4:52:36 PM	SiCl4 MFC set to  0.000000
4/6/2010	4:52:36 PM	Bypass solenoid MFC set to  0.000000
4/6/2010	4:52:36 PM	Tube furnace set to 0
4/6/2010	4:52:37 PM	Run finished at 4:52 PM
4/6/2010	4:52:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
